Microelectronics cleanroom is a special production environment to ensure product quality and efficiency in microelectronics industry. For this project there are many factors considered such as air purification, temperature, humidity, electrostatic, and noise control and so on.
Different classes of microelectronics cleanroom application industries:
1. Integrated circuit manufacturing
- ISO 1 - 3: often used in the most advanced process of photoetching, etching and others, which require extremely high control of tiny particles, and a slight contamination may lead to chip defects.
- ISO 4 - 5: Suitable for thin film deposition, ion implantation and other processes in chip manufacturing, and also has strict particle control requirements.
2. Semiconductor encapsulation test
- ISO 6 - 7: It can meet the requirements of most packaging test links, such as chip packaging, functional test, etc.
3. Panel display manufacturing
- ISO 5 - 6: Used in coating and exposure of LCD panel manufacturing.
4. Electronic component manufacturing
- ISO 7 - 8: used for the production of electronic components with relatively low environmental requirements, such as resistors, capacitors, etc.
In short, the higher the class of the cleanroom, the less the number of suspended particles in the air that can be controlled, the purer the environment, and the more suitable for microelectronic production processes that require extremely stringent production environments. However, the lower-class cleanroom is suitable for production processes that require relatively loose environment.
Main devices of air purification system of microelectronics cleanroom:
1.Air filter
- Primary efficiency filter: mainly used to filter larger particles, such as dust, hair, etc., to play a preliminary role in purifying the air.
- Medium efficiency filters: filter medium-sized particulate pollutants and further improve air cleanliness.
- HEPA filter: the key device to achieve high cleanliness with has high filtration efficiency for particles above 0.3 microns
- Ultra-high efficiency filter (ULPA filter): for 0.1 - 0.3 micron particles its filtration efficiency can be above 99.999%, and it is often used in places with extremely high cleanliness requirements.
2.Fan
- Responsible for driving the air flow, making the air pass through the filter and circulate in the cleanroom.
3.Duct
-used to convey filtered air to ensure uniform distribution of air to all areas of the cleanroom.
4. Fresh air handling unit
- introduce fresh air outside, filter it, and adjust temperature and humidity to meet the needs of the cleanroom.
5. Air purification unit
-integrate a variety of purification and conditioning functions, such as filtration, sterilization, dehumidification, humidification and so on.
6. Static pressure chamber
-stabilize airflow, reduce turbulence and noise of airflow, and ensures uniform air flow through filters.
7. Silencer
- Reduce noise generated by fans and air flow, providing a quiet working environment
8. Differential pressure sensors and controllers
- Monitor the pressure differential between different areas of the cleanroom to ensure that air flows in a predetermined direction to prevent cross-contamination of contaminants.
These devices work together to ensure that the air quality of the microelectronic cleanroom reaches the required cleanliness class.
Key steps and technical points of microelectronic cleanroom engineering:
1. Design planning: according to the production process and requirements, determine the cleanroom class, area, layout, etc. At the same time, the flow route of personnel, materials and equipment, as well as the design of air purification, air conditioning and lighting systems should be considered.
2.Building structure: it should have good sealing and thermal insulation performance to reduce the impact of the external environment on the interior. At the same time, it is necessary to use materials that are not easy to generate dust and static electricity, such as stainless steel and aluminum alloy.
3. Air purification system: it is a core part of microelectronics cleanroom engineering. Usually, high-efficiency filters, fans, air ducts and other devices are used to remove dust, bacteria, viruses and other pollutants in indoor air, so that the air reaches a certain cleanliness level.
4. Air conditioning system: it must be able to control indoor temperature, humidity and pressure difference to meet the requirements of the production process. At the same time, energy-saving and environmentally friendly air-conditioning equipment and technology should be adopted to reduce operating costs.
5. Electrostatic control: microelectronics production process is prone to generate static electricity which will affect product quality. Therefore, it is necessary to take static elimination measures, such as using static eliminators, laying anti-static floors, etc.
6. Noise control: Noise would affect the work efficiency and health of personnel, so noise control measures need to be taken, such as the use of sound insulation materials, installation of mufflers, etc.
7. Lighting system: it should be able to provide sufficient brightness and uniformity to meet the requirements of the production process. At the same time, energy-saving and environmentally friendly lighting equipment and technologies should be adopted to reduce operating costs.
8. Personnel and material management: the entry and exit of personnel and materials shall be strictly managed and controlled to reduce the introduction of external pollutants. At the same time, personnel should be trained to improve their cleanliness awareness and operational skills.
9. Test and verification: after the cleanroom is built, test and verification should be carried out to ensure that the performance of the cleanroom meets the design requirements, which includes air cleanliness, temperature, humidity, pressure difference, static electricity, etc.
In conclusion, microelectronic cleanroom engineering is a complex system which requires multiple factors. Only by adopting advanced technology and equipment can a cleanroom which meets the requirements be built.
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